|
|
| MODEL | | HC 70 |
|
|
| Height x Width x Depth | | 23.5＂(596mm) x 19.5＂(495.3mm) x 21＂(531mm) |
|
| Weight | | 275 Lbs.max (124kg) |
|
Power
Phase
Frequency
Voltage
Operating current | |
3-phase
50/60 Hz
208 ± 10% VAC
20 Amps |
|
Refrigerant
Gas
Purity
Supply Pressure
Return Pressure
Charge Pressure | |
Helium
99.995% Min.,-63℃ Dew Point
300 Psi
100 Psi
210 Psi @ 20℃ |
|
Cooling Water
Flow rate
Temperature
Cooling water heat radiation
Supply and Return fittings | |
2 GPM(7L/min.)
Inlet 10℃ to 27℃
6.0 kw
3/8＂ - 18＂ NPT |
|
Environment
Temperature
Humidity | |
5℃ to 40℃
30% to 95% |
|
| Noise | | Max. 70 dB (A) |
|
| Certifications | | |
|
| CE Mark | | Meets the requirements of European Directive on Electromagnetic Compatibility
(89/336/EEC) and Low Voltage Directive(73/23/EEC) |
|
| SEMI | | Meets SEMI-S2 Environmental, Health, and Safety Guidelines for Semiconductor
Manufacturing Equipment, and SEMI-S8 Safety Guidelines for Ergonomics
Engineering of Semiconductor Manufacturing Equipment. |
|
