|
|
| MODEL | | 2.1 |
|
|
| Height x Width x Depth | | 20＂(512mm) x 19＂(473mm) x 21＂(531mm) |
|
| Weight | | 200 Lbs.(90.7kg) |
|
Power
Phase
Frequency
Voltage
Operating current | |
1-phase
50/60 Hz
208 ± 10% VAC
14 Amps |
|
Refrigerant
Gas
Purity
Charge Pressure | |
Helium
99.995% Min.,-63℃ Dew Point
210 Psi ± 5 Psi (1.448Mpa ± 34kpa) @ 20℃ |
|
Cooling Water
Flow rate
Temperature
Cooling water heat radiation | |
1 gal/min. (3.8L/min.)
Inlet 10℃ to 27℃
2.6 kw |
|
Environment
Temperature
Humidity | |
5℃ to 40℃
30% to 95% |
|
| Noise | | Max. 70 dB (A) |
|
| Certifications | | |
|
| CE Mark | | Meets the requirements of European Directive on Electromagnetic Compatibility
(89/336/EEC) and Low Voltage Directive(73/23/EEC) |
|
| SEMI | | Meets SEMI-S2 Environmental, Health, and Safety Guidelines for Semiconductor
Manufacturing Equipment, and SEMI-S8 Safety Guidelines for Ergonomics
Engineering of Semiconductor Manufacturing Equipment. |
|
