솔라셀제조용 Frunace

제품코드	G046052
판매 회사명	(주)피앤테크
연락처	043-211-3917
홈페이지	-
제품홍보관	http://blog.yeogie.com/p-tech2000

PF-S85 Furnace System

Solar Cell Process Application - POCl3 - BBr3 - N2/H2 Annealing - Oxidation - Activation

PF-S85 Series System Features

 - Wafer size : 125mm * 125mm, 156mm * 156mm

-  Load Capacity : 2000 wafers ( 1 Bank 5 Tube),  400 Wafers / 1 Tube

-  Auto Pressure Control  / Softland & Auto Door

-  Thermal uniformity  accuracy :
   * Between 400℃ and 800℃ ±1℃ /  Between 800℃ and 1150℃ ±0.5℃
-  Ramp rate : 0.1~ 20℃ per minute, both ramp up and ramp down
-  Operating temperature range : 400℃ ~ 1150℃
-  Boat  Speed  Control :  3~125 cm / minute
-  3~6 Zone  by Spikes and Profile T/C

-  Automation Application : Boat  Loader, Elevator

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