광학계측장치

제품코드	G049017
판매 회사명	중원통상
연락처	031-458-1670
홈페이지	-
제품홍보관	http://blog.yeogie.com/jwcdisplay

BandiT - Temperature Monitor [k-Space Associated Inc. USA]

Measure wafer and/or thin-film temperature in a way that is non-contact, non-invasive, and real-time. Insensitive to changing view port transmission, stray light sources, and signal contribution from substrate heaters, kSA BandiT provides a viable solution for low-temperature wafer monitoring where pyrometers cannot measure. Please download the kSA BandiT datasheet for more information and options. Use your kSA BandiT for a variety of tasks, including: Temperature The kSA BandiT is a non-contact, non-invasive, real-time wafer temperature sensor. The BandiT determines the temperature by monitoring the band gap absorption edge from the wafer of interest. kSA BandiT also combines a new BlackBody emission monitoring technology whereby the spectral radiation intensity of a sample is fit in real time to Planck’s equation to determine temperature. Temperature mapping. By combining tailored detector optics packages, kSA BandiT is the only temperature monitoring technique which can provide full 2D temperature information during sample heating. Thickness, Growth Rate kSA BandiT has the ability to determine deposition rate from pyrometric interference oscillations in radiated light from the sample surface at a given wavelength within the spectrometer range. This post deposition technique also provides a ‘fingerprint’ of wavelength intensity changes vs. time during device deposition. A second approach included within BandiT monitors peak and valley inflection points across the wavelength range within the spectrometer range. By fitting these points in real-time, thickness measurements can be made on the sample at any time during or after the deposition has concluded. Surface Roughness By monitoring changes in diffuse reflectivity signal vs. wavelength, kSA BandiT can provide a qualitative measurement of surface roughness. Optical Absorption Edge (Semiconductors) kSA BandiT monitors the optical absorption edge of a semiconductor film at most any temperature. This capability allows for real-time ‘tuning’ of optical properties related to semiconductor band gap during the deposition process. Tailored Optics Integration kSA BandiT may be integrated onto most any MBE, MOCVD, or custom deposition chamber. New optics solutions allow for combining of other kSA product technologies such as kSA MOS to provide further in-situ information where viewport (2D thin film stress) space is limited. Open Customization, Improvement of kSA Products k-Space has a long history of continued innovation with the kSA BandiT through close collaboration with its customer base. As such, kSA listens carefully to customer input and has appropriate engineering staff to respond quickly for integration of new capabilities to our products. Please contact k-Space to discuss your BandiT application in further detail.

[다운로드]

BandiT_Data_Sheet.pdf

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